MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

Yoo Han Woong; David Brunner; Thomas Thurner; Georg Schitter

doi:10.1016/j.ifacol.2019.11.648

MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

Yoo Han Woong, David Brunner, Thomas Thurner, Georg Schitter

Publikation: Beitrag in Fachzeitschrift › Konferenzartikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	49-54
Seitenumfang	6
Fachzeitschrift	IFAC-PapersOnLine
Jahrgang	52
Ausgabenummer	15
DOIs	https://doi.org/10.1016/j.ifacol.2019.11.648
Publikationsstatus	Veröffentlicht - Sept. 2019
Extern publiziert	Ja
Veranstaltung	8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Österreich Dauer: 4 Sept. 2019 → 6 Sept. 2019

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Publisher Copyright:
© 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.

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10.1016/j.ifacol.2019.11.648

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@article{6bbf33aad95f4f6cb8d27939d0aa25ca,

title = "MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors",

keywords = "Characterization, MEMS mirror, Metrology, Microelectromechanical systems (MEMS), Uncertainty analysis",

author = "{Han Woong}, Yoo and David Brunner and Thomas Thurner and Georg Schitter",

note = "Publisher Copyright: {\textcopyright} 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.; 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 ; Conference date: 04-09-2019 Through 06-09-2019",

year = "2019",

month = sep,

doi = "10.1016/j.ifacol.2019.11.648",

language = "English",

volume = "52",

pages = "49--54",

journal = "IFAC-PapersOnLine",

issn = "2405-8963",

publisher = "IFAC Secretariat",

number = "15",

}

TY - JOUR

T1 - MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

AU - Han Woong, Yoo

AU - Brunner, David

AU - Thurner, Thomas

AU - Schitter, Georg

PY - 2019/9

Y1 - 2019/9

KW - Characterization

KW - MEMS mirror

KW - Metrology

KW - Microelectromechanical systems (MEMS)

KW - Uncertainty analysis

UR - http://www.scopus.com/inward/record.url?scp=85077498382&partnerID=8YFLogxK

U2 - 10.1016/j.ifacol.2019.11.648

DO - 10.1016/j.ifacol.2019.11.648

M3 - Conference article

AN - SCOPUS:85077498382

SN - 2405-8963

VL - 52

SP - 49

EP - 54

JO - IFAC-PapersOnLine

JF - IFAC-PapersOnLine

IS - 15

T2 - 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019

Y2 - 4 September 2019 through 6 September 2019

ER -