@article{73e2be12f03c4419ad6c7819ec3add18,
title = "Microstructure and stress gradients in TiW thin films characterized by 40 nm X-ray diffraction and transmission electron microscopy",
keywords = "Internal stress, Residual stress, Thin film, Titanium tungsten, Diffusion barrier, X-ray nanodiffraction",
author = "Fahimeh Saghaeian and Jozef Keckes and Stefan Woehlert and M. Rosenthal and M. Reisinger and J. Todt",
year = "2019",
month = oct,
day = "14",
doi = "10.1016/j.tsf.2019.137576",
language = "English",
volume = "691.2019",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
number = "1 December",
}