Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

Nina Schalk; Jules Simonet Fotso; David Holec; Alexander Fian; Georg Jakopic; Velislava Terziyska; Rostislav Daniel; Christian Mitterer

doi:doi:10.1088/0022-3727/49/2/025307

Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

Nina Schalk
, Jules Simonet Fotso
, David Holec
, Alexander Fian
, Georg Jakopic
, Velislava Terziyska
, Rostislav Daniel
, Christian Mitterer

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	1-9
Seitenumfang	9
Fachzeitschrift	Journal of physics / D, Applied physics
Jahrgang	49
DOIs	https://doi.org/doi:10.1088/0022-3727/49/2/025307
Publikationsstatus	Veröffentlicht - 2016

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doi:10.1088/0022-3727/49/2/025307

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title = "Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures",

author = "Nina Schalk and \{Simonet Fotso\}, Jules and David Holec and Alexander Fian and Georg Jakopic and Velislava Terziyska and Rostislav Daniel and Christian Mitterer",

year = "2016",

doi = "doi:10.1088/0022-3727/49/2/025307",

language = "English",

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journal = "Journal of physics / D, Applied physics",

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TY - JOUR

T1 - Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

AU - Schalk, Nina

AU - Simonet Fotso, Jules

AU - Holec, David

AU - Fian, Alexander

AU - Jakopic, Georg

AU - Terziyska, Velislava

AU - Daniel, Rostislav

AU - Mitterer, Christian

PY - 2016

Y1 - 2016

U2 - doi:10.1088/0022-3727/49/2/025307

DO - doi:10.1088/0022-3727/49/2/025307

M3 - Article

SN - 0022-3727

VL - 49

SP - 1

EP - 9

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

ER -