Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

Sascha Kremmer; Harald Wurmbauer; Andrei Andreev; Christian Teichert; G. Tallarida; S. Spiga; C. Wiemer; M. Fanciulli

Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

Titel in Übersetzung: Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

Sascha Kremmer
, Harald Wurmbauer
, Andrei Andreev
, Christian Teichert
, G. Tallarida
, S. Spiga
, C. Wiemer
, M. Fanciulli

Lehrstuhl für Physik (460)

Publikation: Konferenzbeitrag › Poster › Forschung › Begutachtung

Titel in Übersetzung	Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy
Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2006
Veranstaltung	14th International Winterschool on New Developments in Solid State Physics - Mauterndorf, Österreich Dauer: 13 Feb. 2006 → 17 Feb. 2006

Konferenz

Konferenz	14th International Winterschool on New Developments in Solid State Physics
Land/Gebiet	Österreich
Ort	Mauterndorf
Zeitraum	13/02/06 → 17/02/06

Dieses zitieren

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title = "Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy",

author = "Sascha Kremmer and Harald Wurmbauer and Andrei Andreev and Christian Teichert and G. Tallarida and S. Spiga and C. Wiemer and M. Fanciulli",

year = "2006",

language = "English",

note = "14th International Winterschool on New Developments in Solid State Physics ; Conference date: 13-02-2006 Through 17-02-2006",

}

TY - CONF

T1 - Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

AU - Kremmer, Sascha

AU - Wurmbauer, Harald

AU - Andreev, Andrei

AU - Teichert, Christian

AU - Tallarida, G.

AU - Spiga, S.

AU - Wiemer, C.

AU - Fanciulli, M.

PY - 2006

Y1 - 2006

M3 - Poster

T2 - 14th International Winterschool on New Developments in Solid State Physics

Y2 - 13 February 2006 through 17 February 2006

ER -