@article{327c18f1084247558caba7e8a2eccbd7,
title = "Novel methods for the site specific preparation of micromechanical structures",
author = "S. Wurster and R. Treml and R. Fritz and Kapp, \{M. W.\} and E. Langs and M. Alfreider and C. Ruhs and Imrich, \{P. J.\} and G. Felber and D. Kiener",
year = "2015",
doi = "10.3139/147.110331",
language = "English",
volume = "52",
pages = "131--146",
journal = "Practical metallography = Praktische Metallographie",
issn = "0032-678X",
publisher = "Walter de Gruyter GmbH",
number = "3",
}