@article{d1e1d4c4a68d477484b1edcb09287e3e,
title = "Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target",
author = "Robert Franz and C{\'e}sar Clavero and Rustem Bolat and Rueben Mendelsberg and A. Anders",
year = "2014",
doi = "10.1088/0963-0252/23/3/035001",
language = "English",
volume = "23",
pages = "0350011--03500111",
journal = "Plasma sources science \& technology",
issn = "0963-0252",
publisher = "IOP Publishing Ltd.",
}