Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

Tanja Jörg, Anna Maria Hofer-Roblyek, Harald Köstenbauer, Jörg Winkler, Christian Mitterer

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

6 Zitate (Scopus)

Originalsprache	Englisch
Seiten (von - bis)	021513-1-021513-5
Fachzeitschrift	Journal of vacuum science & technology / A (JVST)
Jahrgang	36
DOIs	https://doi.org/10.1116/1.5009289
Publikationsstatus	Veröffentlicht - 2018

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AU - Jörg, Tanja

AU - Hofer-Roblyek, Anna Maria

AU - Köstenbauer, Harald

AU - Winkler, Jörg

AU - Mitterer, Christian

PY - 2018

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