@inproceedings{cd33f84fe6e04572a672effe5f444b5a,
title = "Photonic superlattice multilayers for EUV lithography infrastructure",
keywords = "Bragg reflectors, Extreme ultraviolet, Photonic crystals, Superlattices",
author = "F. Kuchar and R. Meisels",
year = "2018",
month = jan,
day = "1",
doi = "10.1117/12.2322410",
language = "English",
isbn = "9781510621213",
volume = "10775",
booktitle = "34th European Mask and Lithography Conference",
publisher = "SPIE",
address = "United States",
note = "34th European Mask and Lithography Conference, EMLC 2018 ; Conference date: 18-06-2018 Through 20-06-2018",
}