@article{6d11bc3bf25641f1a497ebb74af77165,
title = "Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates",
keywords = "Eigenspannung, Biegebalkenmethode, Hartstoffschichten, Substratverformung",
author = "Christian Saringer and Michael Tkadletz and Christian Mitterer",
year = "2015",
month = jul,
day = "25",
language = "English",
volume = "274",
pages = "68--75",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}