Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Petr Vita; Doris Prieling; Helfried Steiner; Bernhard Gschaider; Markus Junk; Frank Holsteyns; Felix Staudegger; Christiane Lechner; Hendrik C. Kuhlmann

Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Titel in Übersetzung: Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Petr Vita
, Doris Prieling
, Helfried Steiner
, Bernhard Gschaider
, Markus Junk
, Frank Holsteyns
, Felix Staudegger
, Christiane Lechner
, Hendrik C. Kuhlmann

Lehrstuhl für Geoenergy Production Engineering (550)

Publikation: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband

2 Zitate (Scopus)

1336 Downloads (Pure)

Titel in Übersetzung	Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers
Originalsprache	Englisch
Titel	MAS 2011 CD-ROM Proceedings
Seiten	149-154
Publikationsstatus	Veröffentlicht - 2011

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title = "Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers",

author = "Petr Vita and Doris Prieling and Helfried Steiner and Bernhard Gschaider and Markus Junk and Frank Holsteyns and Felix Staudegger and Christiane Lechner and Kuhlmann, \{Hendrik C.\}",

year = "2011",

language = "English",

isbn = "978-88-903724-5-2",

pages = "149--154",

booktitle = "MAS 2011 CD-ROM Proceedings",

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T1 - Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

AU - Vita, Petr

AU - Prieling, Doris

AU - Steiner, Helfried

AU - Gschaider, Bernhard

AU - Junk, Markus

AU - Holsteyns, Frank

AU - Staudegger, Felix

AU - Lechner, Christiane

AU - Kuhlmann, Hendrik C.

PY - 2011

Y1 - 2011

M3 - Conference contribution

SN - 978-88-903724-5-2

SP - 149

EP - 154

BT - MAS 2011 CD-ROM Proceedings

ER -