Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation

Martin Rausch, Márius Pavlovic, Patrice Kreiml, Megan Cordill, Jörg Winkler, Christian Mitterer

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

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@article{d30727145773436bb4e240ba7781ad66,

title = "Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation",

author = "Martin Rausch and M{\'a}rius Pavlovic and Patrice Kreiml and Megan Cordill and J{\"o}rg Winkler and Christian Mitterer",

year = "2018",

doi = "10.1016/j.apsusc.2018.06.012",

language = "English",

volume = "455",

pages = "1029--1036",

journal = "Applied surface science",

issn = "0169-4332",

publisher = "Elsevier",

}

TY - JOUR

T1 - Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation

AU - Rausch, Martin

AU - Pavlovic, Márius

AU - Kreiml, Patrice

AU - Cordill, Megan

AU - Winkler, Jörg

AU - Mitterer, Christian

PY - 2018

Y1 - 2018

U2 - 10.1016/j.apsusc.2018.06.012

DO - 10.1016/j.apsusc.2018.06.012

M3 - Article

SN - 0169-4332

VL - 455

SP - 1029

EP - 1036

JO - Applied surface science

JF - Applied surface science

ER -