Sputtered MoAlTi thin films with improved oxidation behavior for display applications

Roland Lorenz, Tanja Jörg, Christian Mitterer, Michael O'Sullivan, Jörg Winkler

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung

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@article{4a6fac192ead46dd9164b5964512d1c9,

title = "Sputtered MoAlTi thin films with improved oxidation behavior for display applications",

author = "Roland Lorenz and Tanja J{\"o}rg and Christian Mitterer and Michael O'Sullivan and J{\"o}rg Winkler",

year = "2020",

language = "English",

volume = "2020",

pages = "47--53",

journal = "SVC Bulletin",

publisher = "Society of Vacuum Coaters",

number = "Spring",

}