Structural changes in amorphous SiO2 films revealed by in-situ stress measurements up to 1000C

Publikation: Konferenzbeitrag › Poster › Forschung › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2016
Veranstaltung	ICMCTF International Conference on Metal Coatings and Thin Films 2016 - San Diego, USA / Vereinigte Staaten Dauer: 25 Apr. 2016 → 29 Apr. 2016

Konferenz	ICMCTF International Conference on Metal Coatings and Thin Films 2016
Land/Gebiet	USA / Vereinigte Staaten
Ort	San Diego
Zeitraum	25/04/16 → 29/04/16

Dieses zitieren

@conference{b3155289cf004c1fb8d6a32d25461f08,

title = "Structural changes in amorphous SiO2 films revealed by in-situ stress measurements up to 1000C",

author = "Stephan Bigl and Megan Cordill",

year = "2016",

language = "English",

note = "ICMCTF International Conference on Metal Coatings and Thin Films 2016 ; Conference date: 25-04-2016 Through 29-04-2016",

}