@article{9bd74c5d7b3e4551988c90b671ad4610,
title = "Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit",
author = "J{\"o}rg Paulitsch and M. Schenkel and Th. Zufra{\ss} and Mayrhofer, \{Paul Heinz\} and W.-D. M{\"u}nz",
year = "2010",
doi = "10.1016/j.tsf.2010.05.062",
language = "English",
volume = "518",
pages = "5558--5564",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
}