Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

Titel in Übersetzung: Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

A. Flink, J.M. Andersson, B. Alling, Rostislav Daniel, J. Sjölen, L. Karlsson, L. Hultmann

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

56 Zitate (Scopus)

Titel in Übersetzung	Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films
Originalsprache	Englisch
Seiten (von - bis)	714-721
Fachzeitschrift	Thin solid films
Jahrgang	517
DOIs	https://doi.org/10.1016/j.tsf.2008.08.126
Publikationsstatus	Veröffentlicht - 2008

Zugriff auf Dokument

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title = "Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films",

author = "A. Flink and J.M. Andersson and B. Alling and Rostislav Daniel and J. Sj{\"o}len and L. Karlsson and L. Hultmann",

year = "2008",

doi = "10.1016/j.tsf.2008.08.126",

language = "English",

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TY - JOUR

T1 - Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

AU - Flink, A.

AU - Andersson, J.M.

AU - Alling, B.

AU - Daniel, Rostislav

AU - Sjölen, J.

AU - Karlsson, L.

AU - Hultmann, L.

PY - 2008

Y1 - 2008

U2 - 10.1016/j.tsf.2008.08.126

DO - 10.1016/j.tsf.2008.08.126

M3 - Article

SN - 0040-6090

VL - 517

SP - 714

EP - 721

JO - Thin solid films

JF - Thin solid films

ER -