@article{b55fbac6b81b416eaff5c7c35481dc6d,
title = "Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films",
author = "J.D. Pedarnig and K. Siraj and M.A. Bodea and I. Puica and W. Lang and R. Kolarova and P. Bauer and K. Haselgr{\"u}bler and C. Hasenfuss and Igor Beinik and Christian Teichert",
year = "2010",
doi = "10.1016/j.tsf.2010.07.021",
language = "English",
volume = "518",
pages = "7075--7080",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
}