@article{b0147d8c47f84673b162d4664ae03590,
title = "The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings",
author = "Josef Wagner and Christian Mitterer and M. Penoy and C. Michotte and Wilfried Wallgram and Martin Kathrein",
year = "2008",
doi = "10.1016/j.ijrmhm.2007.01.010",
language = "English",
volume = "26",
pages = "120--126",
journal = "International journal of refractory metals \& hard materials",
issn = "0263-4368",
publisher = "Elsevier B.V.",
}