The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

Titel in Übersetzung: The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

Vipin Chawla, David Holec, Paul Mayrhofer

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

20 Zitate (Scopus)

Titel in Übersetzung	The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices
Originalsprache	Englisch
Seiten (von - bis)	94-100
Fachzeitschrift	Thin solid films
Jahrgang	565
DOIs	https://doi.org/10.1016/j.tsf.2014.06.051
Publikationsstatus	Veröffentlicht - 2014

Zugriff auf Dokument

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title = "The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices",

author = "Vipin Chawla and David Holec and Paul Mayrhofer",

year = "2014",

doi = "10.1016/j.tsf.2014.06.051",

language = "English",

volume = "565",

pages = "94--100",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

AU - Chawla, Vipin

AU - Holec, David

AU - Mayrhofer, Paul

PY - 2014

Y1 - 2014

U2 - 10.1016/j.tsf.2014.06.051

DO - 10.1016/j.tsf.2014.06.051

M3 - Article

SN - 0040-6090

VL - 565

SP - 94

EP - 100

JO - Thin solid films

JF - Thin solid films

ER -