The origin of stresses in magnetron sputtered thin films

Titel in Übersetzung: The origin of stresses in magnetron sputtered thin films

Publikation: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband

Titel in Übersetzung	The origin of stresses in magnetron sputtered thin films
Originalsprache	Englisch
Titel	Proceedings of 4th International Conference on Surface, coatings and Nanostructured Materials
Seiten	44-44
Publikationsstatus	Veröffentlicht - 2009

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@inproceedings{cffc1631c5404a8494f83849d72ebfee,

title = "The origin of stresses in magnetron sputtered thin films",

author = "Rostislav Daniel and Christian Mitterer and K.J. Martinschitz and Jozef Keckes",

year = "2009",

language = "English",

pages = "44--44",

booktitle = "Proceedings of 4th International Conference on Surface, coatings and Nanostructured Materials",

}