The Phase Transformation of Silicon Assessed by an Unloading Contact Pressure Approach

Gerald Josef Kamillo Schaffar, Johann Kappacher, Daniel Tscharnuter, Verena Maier-Kiener

Publikation: Beitrag in FachzeitschriftArtikelForschungBegutachtung

Abstract

Silicon is of great economic importance for the semiconductor industry as well as of academic interest because of its high-pressure phase transformations. These transformations also occur during the indentation of silicon. To further investigate these transformations, a modified method using the continuous stiffness measurement (CSM) during unloading is presented in this work. The use of the CSM signal allows directly calculating the mean contact pressure while unloading. The measurements will be compared to conventional indentation tests and data from high-pressure cell experiments reported in the literature. Furthermore, the influence of constant load holding segments on the phase transformation during unloading is investigated.
OriginalspracheEnglisch
Seiten (von - bis)2220-2230
Seitenumfang11
FachzeitschriftJOM
Jahrgang74.2022
Ausgabenummer6
Frühes Online-Datum18 Apr. 2022
DOIs
PublikationsstatusVeröffentlicht - 18 Apr. 2022

Bibliographische Notiz

Funding Information:
The financial support by the Austrian Federal Government represented by the Austrian Research Promotion Agency (FFG) within Project No. 884573 is gratefully acknowledged.

Publisher Copyright:
© 2022, The Author(s).

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