@article{ce767f5d599f48bd8f9572f1cbacfe1f,
title = "Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography",
author = "D. Braun and Rados Gajic and Friedemar Kuchar and Regina Korntner and E. Haugeneder and H. L{\"o}schner and J. Butschke and F. Letzkus and R. Springer",
year = "2003",
language = "English",
volume = "21",
pages = "123--126",
journal = "Journal of vacuum science \& technology / B (JVST)",
issn = "0734-211X",
publisher = "American Institute of Physics",
}