Thermally-induced stresses in thin aluminum layers grown on silicon

Titel in Übersetzung: Thermally-induced stresses in thin aluminum layers grown on silicon

Ernst Eiper, R. Resel, C. Eisenmenger-Sittner, M. Hafok, Jozef Keckes

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

10 Zitate (Scopus)

Titel in Übersetzung	Thermally-induced stresses in thin aluminum layers grown on silicon
Originalsprache	Englisch
Seiten (von - bis)	74-76
Fachzeitschrift	Powder diffraction
Publikationsstatus	Veröffentlicht - 2004

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@article{6f841d30f0704ffd8fd2503160ef80c6,

title = "Thermally-induced stresses in thin aluminum layers grown on silicon",

author = "Ernst Eiper and R. Resel and C. Eisenmenger-Sittner and M. Hafok and Jozef Keckes",

year = "2004",

language = "English",

pages = "74--76",

journal = "Powder diffraction",

issn = "0885-7156",

publisher = "Cambridge University Press",

}