Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum

Siegfried Zöhrer, André Anders, Robert Franz

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

6 Zitate (Scopus)

Originalsprache	Englisch
Seiten (von - bis)	1-17
Fachzeitschrift	Plasma sources science & technology
DOIs	https://doi.org/10.1088/1361-6595/aabdc7
Publikationsstatus	Veröffentlicht - 2018

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AU - Zöhrer, Siegfried

AU - Anders, André

AU - Franz, Robert

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