Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

6 Zitate (Scopus)

Originalsprache	Englisch
Seiten (von - bis)	1-17
Fachzeitschrift	Plasma sources science & technology
DOIs	https://doi.org/10.1088/1361-6595/aabdc7
Publikationsstatus	Veröffentlicht - 2018

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title = "Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum",

author = "Siegfried Z{\"o}hrer and Andr{\'e} Anders and Robert Franz",

year = "2018",

doi = "10.1088/1361-6595/aabdc7",

language = "English",

pages = "1--17",

journal = "Plasma sources science \& technology",

issn = "0963-0252",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum

AU - Zöhrer, Siegfried

AU - Anders, André

AU - Franz, Robert

PY - 2018

Y1 - 2018

U2 - 10.1088/1361-6595/aabdc7

DO - 10.1088/1361-6595/aabdc7

M3 - Article

SN - 0963-0252

SP - 1

EP - 17

JO - Plasma sources science & technology

JF - Plasma sources science & technology

ER -