@article{e3b51d6372534cc7b02502f3ebc737a0,
title = "TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography",
author = "Marlene M{\"u}hlbacher and Grzegorz Greczynski and Bernhard Sartory and \{Mendez Martin\}, Francisca and Nina Schalk and Jun Lu and Lars Hultman and Christian Mitterer",
year = "2016",
month = feb,
day = "19",
doi = "10.1116/1.4942003",
language = "English",
volume = "34.2016",
pages = "1--8",
journal = "Journal of Vacuum Science and Technology B, JVSTB",
issn = "2166-2746",
publisher = "American Institute of Physics",
number = "2",
}