Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties

Publikation: Konferenzbeitrag › Vortrag › Forschung › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 25 Apr. 2017
Veranstaltung	44th International Conference on Metal Coatings and Thin Films 2017 - San Diego, USA / Vereinigte Staaten Dauer: 23 Apr. 2017 → 28 Apr. 2017

Konferenz	44th International Conference on Metal Coatings and Thin Films 2017
Kurztitel	44th ICMCTF
Land/Gebiet	USA / Vereinigte Staaten
Ort	San Diego
Zeitraum	23/04/17 → 28/04/17

Dieses zitieren

@conference{2e8babe9c6084406a4749f3a29876117,

title = "Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties",

author = "Christian Saringer",

year = "2017",

month = apr,

day = "25",

language = "English",

note = "44th International Conference on Metal Coatings and Thin Films 2017 ; Conference date: 23-04-2017 Through 28-04-2017",

}