Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Julian Pilz; Alberto Perrotta; Paul Christian; Martin Tazreiter; Roland Resel; Günther Leising; Thomas Griesser; Anna Maria Coclite

doi:10.1116/1.5003334

Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Julian Pilz, Alberto Perrotta, Paul Christian, Martin Tazreiter, Roland Resel, Günther Leising, Thomas Griesser, Anna Maria Coclite

Technische Universität Graz

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

13 Zitate (Scopus)

Originalsprache	Englisch
Aufsatznummer	01A109
Fachzeitschrift	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Jahrgang	36
Ausgabenummer	1
DOIs	https://doi.org/10.1116/1.5003334
Publikationsstatus	Veröffentlicht - 1 Jan. 2018

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10.1116/1.5003334

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Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature. / Pilz, Julian; Perrotta, Alberto; Christian, Paul et al.
in: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Jahrgang 36, Nr. 1, 01A109, 01.01.2018.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

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AU - Resel, Roland

AU - Leising, Günther

AU - Griesser, Thomas

AU - Coclite, Anna Maria

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