@article{fcc746283b684342a0876bc203639dab,
title = "Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature",
author = "Julian Pilz and Alberto Perrotta and Paul Christian and Martin Tazreiter and Roland Resel and G{\"u}nther Leising and Thomas Griesser and Coclite, \{Anna Maria\}",
year = "2018",
month = jan,
day = "1",
doi = "10.1116/1.5003334",
language = "English",
volume = "36",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "1",
}