Controlling the Hydrogen Source in zinc, titanium, and aluminum oxides deposited via Atomic Layer Deposition

  • Putz, B. (Speaker)
  • Ivo Utke (contributor)
  • Johann Michler (contributor)
  • Krzysztof Mackosz (contributor)

Activity: Talk or presentation Oral presentation

Period29 May 2023
Event titleEuroCVD
Event typeConference
LocationLeuven, BelgiumShow on map
Degree of RecognitionInternational