Oxidation and wet-etching behaviour of MoAlTi thin films deposited by sputtering from a MoAlTi compound target

Roland Lorenz (Speaker)
Michael O'Sullivan (contributor)
Mitterer, C. (contributor)

Chair of Functional Materials and Materials Systems (425)

Activity: Talk or presentation › Invited talk

Period	2018 → …
Event title	SVC TechCon 2018
Event type	Conference