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Sputter deposited quaternary oxynitrides of transition metals and aluminum
Schalk, N.
(Speaker)
Tkadletz, M.
(contributor)
Mitterer, C.
(contributor)
Chair of Functional Materials and Materials Systems (425)
Activity
:
Talk or presentation
›
Invited talk
Period
22 Nov 2020
→
26 Nov 2020
Event title
18th International Conference on Thin Films & 18th Joint Vacuum Conference
Event type
Conference
Location
Budapest, Hungary
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