The sputter performance of an industrial-scale planar Mo-target over ist lifetime:target erosion and film properties
- Martin Rausch (Speaker)
- Asaf Sabag (contributor)
- Karl-Heinz Pichler (contributor)
- Georg Gruber (contributor)
- Judith Köstenbauer (contributor)
- Harald Köstenbauer (contributor)
- Patrice Kreiml (contributor)
- Megan J. Cordill (contributor)
- Jörg Winkler (contributor)
- Mitterer, C. (contributor)
Activity: Talk or presentation › Oral presentation