A capacitance ultrasonic transducer with micromachined backplate for fast flow measurements in hot pulsating gases

Andreas Schröder, Mario Kupnik, Paul O'Leary, Ewald Benes, Martin Gröschl

Research output: Contribution to journalArticleResearchpeer-review

9 Citations (Scopus)
Original languageEnglish
Article number1661569
Pages (from-to)898-905
Number of pages8
JournalIEEE sensors journal
Issue number4
Publication statusPublished - 1 Aug 2006


  • Capacitance transducer
  • Exhaust gas
  • High-temperature ultrasonic transducer
  • Mass flowmeter
  • Pulsating gas flow
  • Ultrasonic flowmeter (UFM)

Cite this