@article{09d5e7bde1174c499c3c89fec437453a,
title = "A capacitance ultrasonic transducer with micromachined backplate for fast flow measurements in hot pulsating gases",
keywords = "Capacitance transducer, Exhaust gas, High-temperature ultrasonic transducer, Mass flowmeter, Pulsating gas flow, Ultrasonic flowmeter (UFM)",
author = "Andreas Schr{\"o}der and Mario Kupnik and Paul O'Leary and Ewald Benes and Martin Gr{\"o}schl",
year = "2006",
month = aug,
day = "1",
doi = "10.1109/JSEN.2006.877975",
language = "English",
volume = "6",
pages = "898--905",
journal = "IEEE sensors journal",
issn = "1530-437X",
publisher = "Institute of Electrical and Electronics Engineers",
number = "4",
}