A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

K. Matoy, H. Schönherr, T. Detzel, Thomas Schöberl, Reinhard Pippan, Christian Motz, Gerhard Dehm

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Translated title of the contribution	A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films
Original language	English
Pages (from-to)	247-256
Journal	Thin solid films
Volume	518
Publication status	Published - 2009

Cite this

@article{a7ef94f3548f422389c2585b219eff9c,

title = "A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films",

author = "K. Matoy and H. Sch{\"o}nherr and T. Detzel and Thomas Sch{\"o}berl and Reinhard Pippan and Christian Motz and Gerhard Dehm",

year = "2009",

language = "English",

volume = "518",

pages = "247--256",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

AU - Matoy, K.

AU - Schönherr, H.

AU - Detzel, T.

AU - Schöberl, Thomas

AU - Pippan, Reinhard

AU - Motz, Christian

AU - Dehm, Gerhard

PY - 2009

Y1 - 2009

M3 - Article

SN - 0040-6090

VL - 518

SP - 247

EP - 256

JO - Thin solid films

JF - Thin solid films

ER -