A direct method of determining complex depth profiles of residual stresses in thin films on a nanoscale

Stefan Massl, Jozef Keckes, Reinhard Pippan

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48 Citations (Scopus)
Translated title of the contributionA direct method of determining complex depth profiles of residual stresses in thin films on a nanoscale
Original languageEnglish
Pages (from-to)4835-4844
JournalActa materialia
Volume55
Publication statusPublished - 2007

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