Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

Felix Biegger; Felix Jungwirth; Michael Stanislaus Seifner; Christoph Rameshan; Sven Barth

doi:10.1007/s00706-017-1980-2

Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

Felix Biegger, Felix Jungwirth, Michael Stanislaus Seifner, Christoph Rameshan, Sven Barth

Institute of Materials Science and Technology

Research output: Contribution to journal › Article › Research › peer-review

4 Citations (Scopus)

Abstract

Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [

Original language	English
Pages (from-to)	1385-1392
Number of pages	8
Journal	Monatshefte fur Chemie
Volume	148.2017
Issue number	8
DOIs	https://doi.org/10.1007/s00706-017-1980-2
Publication status	Published - 2 Jun 2017
Externally published	Yes

Bibliographical note

Keywords

AACVD
Indium aminoalcoholates
Nanowires
Oxysulphides
Thin films

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10.1007/s00706-017-1980-2

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abstract = "Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [",

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author = "Felix Biegger and Felix Jungwirth and Seifner, {Michael Stanislaus} and Christoph Rameshan and Sven Barth",

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doi = "10.1007/s00706-017-1980-2",

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AU - Biegger, Felix

AU - Jungwirth, Felix

AU - Seifner, Michael Stanislaus

AU - Rameshan, Christoph

AU - Barth, Sven

PY - 2017/6/2

Y1 - 2017/6/2

N2 - Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [

AB - Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [

KW - AACVD

KW - Indium aminoalcoholates

KW - Nanowires

KW - Oxysulphides

KW - Thin films

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JF - Monatshefte fur Chemie

IS - 8

ER -

Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

Abstract

Bibliographical note

Keywords

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