AFM based morphological and electrical characterization of hot wall epitaxy grown 6P/SiO2

Translated title of the contribution: AFM based morphological and electrical characterization of hot wall epitaxy grown 6P/SiO2
  • Markus Kratzer
  • , Stefan Klima
  • , Igor Beinik
  • , Quan Shen
  • , Alois Lugstein
  • , Christian Teichert

Research output: Contribution to conferencePosterResearchpeer-review

Translated title of the contributionAFM based morphological and electrical characterization of hot wall epitaxy grown 6P/SiO2
Original languageGerman
Publication statusPublished - 2010
EventÖPG 2010 - Salzburg, Austria
Duration: 6 Sept 201010 Sept 2010

Conference

ConferenceÖPG 2010
Abbreviated titleÖPG 2010
Country/TerritoryAustria
CitySalzburg
Period6/09/1010/09/10

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