@article{35f308194ea947fc9340dba51f9f0f3a,
title = "Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS",
keywords = "ARXPS, LiNbO, LiTaO, SAW, stability, tantalum deposition, titanium deposition",
author = "U. Vogel and Thomas Gemming and J{\"u}rgen Eckert and Stefan Oswald",
year = "2016",
month = mar,
day = "30",
doi = "10.1002/sia.6006",
language = "English",
volume = "48.2016",
pages = "570--574",
journal = "Surface and interface analysis",
issn = "0142-2421",
publisher = "John Wiley & Sons, Gro{\ss}britannien",
number = "7",
}