Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers

Andreas Kleinbichler, Juraj Todt, Johannes Zechner, Stefan Wöhlert, Daniel Többens, Megan Cordill

Research output: Contribution to journal › Article › Research › peer-review

4 Citations (Scopus)

Original language	English
Pages (from-to)	376-381
Number of pages	6
Journal	Surface & coatings technology
Volume	332.2017
Issue number	25 December
DOIs	https://doi.org/10.1016/j.surfcoat.2017.07.087
Publication status	E-pub ahead of print - 18 Sept 2017

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title = "Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers",

author = "Andreas Kleinbichler and Juraj Todt and Johannes Zechner and Stefan W{\"o}hlert and Daniel T{\"o}bbens and Megan Cordill",

year = "2017",

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doi = "10.1016/j.surfcoat.2017.07.087",

language = "English",

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pages = "376--381",

journal = "Surface & coatings technology",

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T1 - Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers

AU - Kleinbichler, Andreas

AU - Todt, Juraj

AU - Zechner, Johannes

AU - Wöhlert, Stefan

AU - Többens, Daniel

AU - Cordill, Megan

PY - 2017/9/18

Y1 - 2017/9/18

U2 - 10.1016/j.surfcoat.2017.07.087

DO - 10.1016/j.surfcoat.2017.07.087

M3 - Article

SN - 0257-8972

VL - 332.2017

SP - 376

EP - 381

JO - Surface & coatings technology

JF - Surface & coatings technology

IS - 25 December

ER -