Atom probe specimen preparation and 3D interfacial study of Ti-Al-N thin films

  • Richard Rachbauer
  • , S. Massl
  • , Erich Stergar
  • , P. Felfer
  • , Paul Heinz Mayrhofer

Research output: Contribution to journalArticleResearchpeer-review

35 Citations (Scopus)
Translated title of the contributionAtom probe specimen preparation and 3D interfacial study of Ti-Al-N thin films
Original languageEnglish
Pages (from-to)1811-1816
JournalSurface & coatings technology
Volume204
DOIs
Publication statusPublished - 2010

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