Automatic etch pit detection and characterization in KOH etch images of 4H-SiC using deep learning

Georg Holub, Sebastian Hofer, Thomas Obermüller, Lorenz Romaner

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication status	Published - 2024
Event	International Conference on Silicon Carbide and Related Materials (ICSCRM 2024) - North Carolina, United States Duration: 29 Sept 2024 → 4 Oct 2024

Conference	International Conference on Silicon Carbide and Related Materials (ICSCRM 2024)
Country/Territory	United States
City	North Carolina
Period	29/09/24 → 4/10/24

Cite this

@conference{c355f5ad44994a839a636b5f882c1042,

title = "Automatic etch pit detection and characterization in KOH etch images of 4H-SiC using deep learning",

author = "Georg Holub and Sebastian Hofer and Thomas Oberm{\"u}ller and Lorenz Romaner",

year = "2024",

language = "English",

note = "International Conference on Silicon Carbide and Related Materials (ICSCRM 2024) ; Conference date: 29-09-2024 Through 04-10-2024",

}

Automatic etch pit detection and characterization in KOH etch images of 4H-SiC using deep learning. / Holub, Georg; Hofer, Sebastian; Obermüller, Thomas et al.
2024. Poster session presented at International Conference on Silicon Carbide and Related Materials (ICSCRM 2024), North Carolina, United States.

Research output: Contribution to conference › Poster › Research › peer-review