Behavior of SiO2 nanostrures under intense extreme ultraviolet illumination

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Translated title of the contribution	Behavior of SiO2 nanostrures under intense extreme ultraviolet illumination
Original language	English
Journal	Journal of applied physics
Volume	97
DOIs	https://doi.org/10.1063/1.1904723
Publication status	Published - 2005

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@article{9d47ae8dc42d49d9bbab1648495c2c56,

title = "Behavior of SiO2 nanostrures under intense extreme ultraviolet illumination",

author = "Christian Teichert and Sascha Kremmer",

year = "2005",

doi = "10.1063/1.1904723",

language = "English",

volume = "97",

journal = "Journal of applied physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}