C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings

Christoph Czettl, Christian Mitterer, M Penoy, C. Michotte, M. Kathrein

Research output: Contribution to journal › Article › Research › peer-review

4 Citations (Scopus)

Translated title of the contribution	C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings
Original language	English
Pages (from-to)	127-132
Journal	Surface & coatings technology
Volume	215
DOIs	https://doi.org/10.1016/j.surfcoat.2012.08.081
Publication status	Published - 2013

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title = "C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings",

author = "Christoph Czettl and Christian Mitterer and M Penoy and C. Michotte and M. Kathrein",

year = "2013",

doi = "10.1016/j.surfcoat.2012.08.081",

language = "English",

volume = "215",

pages = "127--132",

journal = "Surface & coatings technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings

AU - Czettl, Christoph

AU - Mitterer, Christian

AU - Penoy, M

AU - Michotte, C.

AU - Kathrein, M.

PY - 2013

Y1 - 2013

U2 - 10.1016/j.surfcoat.2012.08.081

DO - 10.1016/j.surfcoat.2012.08.081

M3 - Article

SN - 0257-8972

VL - 215

SP - 127

EP - 132

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -