Translated title of the contribution | Can micro-compression testing provide stress-strain data for thin films?: A comparative study using Cu, VN, TiN and W coatings |
---|---|
Original language | English |
Pages (from-to) | 1517-1521 |
Journal | Thin solid films |
Volume | 518 |
DOIs | |
Publication status | Published - 2009 |
Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings
Gerhard Dehm, Hans-Peter Wörgötter, Sophie Cazottes, Jaya M. Purswani, Daniel Gall, Christian Mitterer, Daniel Kiener
Research output: Contribution to journal › Article › Research › peer-review
17
Citations
(Scopus)