@article{912c83a4ba3b4caba7218e443ab70825,
title = "Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings",
author = "Gerhard Dehm and Hans-Peter W{\"o}rg{\"o}tter and Sophie Cazottes and Purswani, \{Jaya M.\} and Daniel Gall and Christian Mitterer and Daniel Kiener",
year = "2009",
doi = "10.1016/j.tsf.2009.09.070",
language = "English",
volume = "518",
pages = "1517--1521",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
}