@article{4614329830f84b63bca4b35301248357,
title = "Characterization of 6H-SiC surfaces after ion implantation and annealing using positron annihilation spectroscopy and atomic force microscopy",
author = "G. Brauer and W. Anwand and W. Skorupa and S. Brandstetter and Christian Teichert",
year = "2006",
doi = "10.1063/1.2161940",
language = "English",
volume = "99",
pages = "023523--1--023523--8",
journal = "Journal of applied physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
}