Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

P. Siffalovic; E. Majkova; L. Chitu; M. Jergel; S. Luby; Jozef Keckes; Günther Alois Maier; A. Timmann; S.V. Roth; T. Tsuru; T. Harada; M. Yamamoto; U. Heinzmann

Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

P. Siffalovic, E. Majkova, L. Chitu, M. Jergel, S. Luby, Jozef Keckes, Günther Alois Maier, A. Timmann, S.V. Roth, T. Tsuru, T. Harada, M. Yamamoto, U. Heinzmann

Chair of Materials Physics (430)

Research output: Contribution to journal › Article › Research › peer-review

20 Citations (Scopus)

Translated title of the contribution	Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering
Original language	English
Pages (from-to)	19-25
Journal	Vacuum
Volume	89
Publication status	Published - 2009

Cite this

@article{97785350f58b475c9e4694892d6080b2,

title = "Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering",

author = "P. Siffalovic and E. Majkova and L. Chitu and M. Jergel and S. Luby and Jozef Keckes and Maier, {G{\"u}nther Alois} and A. Timmann and S.V. Roth and T. Tsuru and T. Harada and M. Yamamoto and U. Heinzmann",

year = "2009",

language = "English",

volume = "89",

pages = "19--25",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

AU - Siffalovic, P.

AU - Majkova, E.

AU - Chitu, L.

AU - Jergel, M.

AU - Luby, S.

AU - Keckes, Jozef

AU - Maier, Günther Alois

AU - Timmann, A.

AU - Roth, S.V.

AU - Tsuru, T.

AU - Harada, T.

AU - Yamamoto, M.

AU - Heinzmann, U.

PY - 2009

Y1 - 2009

M3 - Article

SN - 0042-207X

VL - 89

SP - 19

EP - 25

JO - Vacuum

JF - Vacuum

ER -