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Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

  • P. Siffalovic
  • , E. Majkova
  • , L. Chitu
  • , M. Jergel
  • , S. Luby
  • , Jozef Keckes
  • , Günther Alois Maier
  • , A. Timmann
  • , S.V. Roth
  • , T. Tsuru
  • , T. Harada
  • , M. Yamamoto
  • , U. Heinzmann

Research output: Contribution to journalArticleResearchpeer-review

20 Citations (Scopus)
Translated title of the contributionCharacterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering
Original languageEnglish
Pages (from-to)19-25
JournalVacuum
Volume89
Publication statusPublished - 2009

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