@article{97785350f58b475c9e4694892d6080b2,
title = "Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering",
author = "P. Siffalovic and E. Majkova and L. Chitu and M. Jergel and S. Luby and Jozef Keckes and Maier, \{G{\"u}nther Alois\} and A. Timmann and S.V. Roth and T. Tsuru and T. Harada and M. Yamamoto and U. Heinzmann",
year = "2009",
language = "English",
volume = "89",
pages = "19--25",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier Ltd",
}