CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings

Christoph Czettl; Christian Mitterer; U. Mühle; D Rafaja; S Puchner; H. Hutter; M. Penoy; C. Michotte; M. Kathrein

doi:10.1016/j.surfcoat.2011.07.086

CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings

Christoph Czettl
, Christian Mitterer
, U. Mühle
, D Rafaja
, S Puchner
, H. Hutter
, M. Penoy
, C. Michotte
, M. Kathrein

Chair of Functional Materials and Materials Systems (425)

Research output: Contribution to journal › Article › Research › peer-review

26 Citations (Scopus)

Translated title of the contribution	CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings
Original language	English
Pages (from-to)	1691-1697
Journal	Surface & coatings technology
Volume	206
DOIs	https://doi.org/10.1016/j.surfcoat.2011.07.086
Publication status	Published - 2011

Access to Document

10.1016/j.surfcoat.2011.07.086

Cite this

@article{76c2bc0bc8334026acc63c9f1b0a5f96,

title = "CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings",

author = "Christoph Czettl and Christian Mitterer and U. M{\"u}hle and D Rafaja and S Puchner and H. Hutter and M. Penoy and C. Michotte and M. Kathrein",

year = "2011",

doi = "10.1016/j.surfcoat.2011.07.086",

language = "English",

volume = "206",

pages = "1691--1697",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings

AU - Czettl, Christoph

AU - Mitterer, Christian

AU - Mühle, U.

AU - Rafaja, D

AU - Puchner, S

AU - Hutter, H.

AU - Penoy, M.

AU - Michotte, C.

AU - Kathrein, M.

PY - 2011

Y1 - 2011

U2 - 10.1016/j.surfcoat.2011.07.086

DO - 10.1016/j.surfcoat.2011.07.086

M3 - Article

SN - 0257-8972

VL - 206

SP - 1691

EP - 1697

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -